Abstract

Computed microtomography (CMT) is a powerful tool for obtaining nondestructively a three-dimensional view of the internal structure of opaque objects [4]. In contrast to the widespread use of this technique in the millimeter scale as part of diagnostic procedures in hospitals, we are interested in the investigation of objects on the micrometer scale. An application of this method is, for example, the quality control processes during the production of three-dimensional semiconductor wavers. Being able to visualize the details of chip wavers in all three dimensions allows engineers to improve the chip design before production. Other examples can be found in the field of earth science, where common tasks include investigation of the interior of a very small meteorite and study of the enclosures of very tiny materials in opaque diamonds formed 100,000 years ago, in order to determine more about the origin and development of the earth. The energy and the infrastructure necessary to conduct such experiments can be provided by using x-ray beams at synchrotrons. The use of x-rays for investigating the internal structure of materials at the micron scale has grown rapidly over the past decade as a result of the availability of synchrotron radiation sources. One such facility is the Advanced Photon Source (APS) at Argonne National Laboratory. A typical computed microtomography experiment at the APS proceeds as follows. A sample is mounted in the experiment station, parameters are adjusted, and the sample is illuminated by a colliminated beam of x-rays. Data is collected for multiple sample orientations by using a charge-coupled device. A time …

Metadata

publication

year

2000

publication date

2000/3/29

authors

Gregor von Laszewski, Mei-Hui Su, Ian Foster, Carl Kesselman

link

https://ftp.mcs.anl.gov/pub/tech_reports/reports/P802.pdf

resource_link

https://ftp.mcs.anl.gov/pub/tech_reports/reports/P802.pdf