Abstract

Int. Cl. GIIC 11/16(2006.01) HOIL 27/22(2006.01)(52) US CI.??? GIIC 11/161 (2013.01); GIIC 11/1655

Date

March 30, 2021

Authors

A Jaiswal, AP Jacob, S Soss

Inventors

Akhilesh Jaiswal, Ajey Poovannummoottil Jacob, Steven Soss

Patent_office

US

Patent_number

10964367

Application_number

16778548