Publications
Semiconductor detectors with butt-end coupled waveguide and method of forming the same
Abstract
The present disclosure generally relates to semiconductor detectors for use in optoelectronic/photonic devices and integrated circuit (IC) chips, and methods for forming same. The present disclosure also relates to photodetectors inte grated with waveguide stacks, more particularly, photode tectors with butt-end coupled waveguides. The present dis closure also relates to methods of forming such structures. 20 Claims, 19 Drawing Sheets
Metadata
- publication
- US Patent 10,910,503, 2021
- year
- 2021
- publication date
- 2021/2/2
- authors
- Y Bian, AP Jacob
- link
- https://patents.google.com/patent/US10910503B1/en
- resource_link
- https://patentimages.storage.googleapis.com/4c/33/58/de7141c9159f05/US10910503.pdf
- inventors
- Yusheng Bian, Ajey Poovannummoottil Jacob
- patent_office
- US
- patent_number
- 10910503
- application_number
- 16544866