Publications

Towards low-loss monolithic silicon and nitride photonic building blocks in state-of-the-art 300mm CMOS foundry

Abstract

We review recent progress in loss reduction of Si and SiN waveguides in GLOBALFOUNDRIES 300mm monolithic Si photonics platform. Primary challenges to creating low-loss CMOS integrated photonic components are highlighted and potential solutions are outlined.

Metadata

publication
Frontiers in Optics, FW5D. 2, 2020
year
2020
publication date
2020/9/14
authors
Yusheng Bian, Javier Ayala, Colleen Meagher, Bo Peng, Michal Rakowski, Ajey Jacob, Karen Nummy, Andy Stricker, Zoey Sowinski, Asli Sahin, Abdelsalam Aboketaf, Shuren Hu, Ian Stobert, Kate Mclean, Louis Medina, Kevin Dezfulian, Brendan Harris, Subramanian Krishnamurthy, Thomas Houghton, Won Suk Lee, Massimo Sorbara, Dave Riggs, Ted Letavic, Anthony Yu, Ken Giewont, John Pellerin
link
https://opg.optica.org/abstract.cfm?uri=FiO-2020-FW5D.2
conference
Frontiers in Optics
pages
FW5D. 2
publisher
Optica Publishing Group