Publications

Silicon nitride grating couplers

Abstract

Grating couplers and methods of fabricating a grating coupler. The grating coupler may include a plurality of grating structures arranged on a substrate and a layer arranged over the grating structures. The grating structures are composed of a first material characterized by a first refractive index with a real part. The layer is composed of a second material characterized by a second refractive index with a real part. The real part of the second refractive index is greater than the real part of the first refractive index of the first material for electromagnetic radiation with a wavelength in a range of 1 micron to 9 microns.

Metadata

publication
US Patent 10,746,925, 2020
year
2020
publication date
2020/8/18
authors
AP Jacob, Y Bian
link
https://patents.google.com/patent/US10746925B2/en
resource_link
https://patentimages.storage.googleapis.com/c7/3b/14/1dfce1890c4745/US10746925.pdf
inventors
Ajey P Jacob, Yusheng Bian
patent_office
US
patent_number
10746925
application_number
15878025