Publications
Silicon nitride grating couplers
Abstract
Grating couplers and methods of fabricating a grating coupler. The grating coupler may include a plurality of grating structures arranged on a substrate and a layer arranged over the grating structures. The grating structures are composed of a first material characterized by a first refractive index with a real part. The layer is composed of a second material characterized by a second refractive index with a real part. The real part of the second refractive index is greater than the real part of the first refractive index of the first material for electromagnetic radiation with a wavelength in a range of 1 micron to 9 microns.
Metadata
- publication
- US Patent 10,746,925, 2020
- year
- 2020
- publication date
- 2020/8/18
- authors
- AP Jacob, Y Bian
- link
- https://patents.google.com/patent/US10746925B2/en
- resource_link
- https://patentimages.storage.googleapis.com/c7/3b/14/1dfce1890c4745/US10746925.pdf
- inventors
- Ajey P Jacob, Yusheng Bian
- patent_office
- US
- patent_number
- 10746925
- application_number
- 15878025