Publications
Folded ballistic conductor interconnect line
Abstract
A method includes forming a folding template in a first dielectric layer. The folding template has a plurality of surfaces that are positioned in different planes. A ballistic conductor line is formed on the plurality of surfaces of the folding template. A device includes a first dielectric layer and a vertically folded line disposed in the first dielectric layer, the vertically folded line including a ballistic conductor material.
Metadata
- publication
- US Patent 9,633,947, 2017
- year
- 2017
- publication date
- 2017/4/25
- authors
- AP Jacob
- link
- https://patents.google.com/patent/US9633947B2/en
- resource_link
- https://patentimages.storage.googleapis.com/f7/ac/f0/85cc955696a901/US9633947.pdf
- inventors
- Ajey Poovannummoottil Jacob
- patent_office
- US
- patent_number
- 9633947
- application_number
- 14608337