Publications
Methods of forming replacement fins for a FinFET semiconductor device by performing a replacement growth process
Abstract
METHODS OF FORMING REPLACEMENT FNS FOR A FINFET SEMCONDUCTOR DEVICE BY PERFORMINGA REPLACEMENT GROWTH PROCESS
Metadata
- publication
- US Patent 9,240,342, 2016
- year
- 2016
- publication date
- 2016/1/19
- authors
- AP Jacob, MK Akarvardar, J Fronheiser, WP Maszara
- link
- https://patents.google.com/patent/US9240342B2/en
- resource_link
- https://patentimages.storage.googleapis.com/80/6d/db/4df452a12ee07d/US9240342.pdf
- inventors
- Ajey P Jacob, Murat K Akarvardar, Jody Fronheiser, Witold P Maszara
- patent_office
- US
- patent_number
- 9240342
- application_number
- 13944200