Publications
Fin pitch scaling and active layer isolation
Abstract
2. Background Information Fin Field-Effect Transistors (FinFET) devices are cur rently being developed to replace conventional planar metal oxide semiconductor field-effect transistors (MOSFETs) in advanced complementary metal oxide semiconductor (CMOS) technology due to their improved short-channel effect immunity and higher on-current to off-current ratio
Metadata
- publication
- US Patent 9,076,842, 2015
- year
- 2015
- publication date
- 2015/7/7
- authors
- AP Jacob, MK Akarvardar, SJ Bentley, BJ Pawlak
- link
- https://patents.google.com/patent/US9076842B2/en
- resource_link
- https://patentimages.storage.googleapis.com/22/61/96/09bea95401b951/US9076842.pdf
- inventors
- Ajey Poovannummoottil Jacob, Murat Kerem Akarvardar, Steven John Bentley, Bartlomiej Jan Pawlak
- patent_office
- US
- patent_number
- 9076842
- application_number
- 14011125