Publications

Fin pitch scaling and active layer isolation

Abstract

2. Background Information Fin Field-Effect Transistors (FinFET) devices are cur rently being developed to replace conventional planar metal oxide semiconductor field-effect transistors (MOSFETs) in advanced complementary metal oxide semiconductor (CMOS) technology due to their improved short-channel effect immunity and higher on-current to off-current ratio

Metadata

publication
US Patent 9,076,842, 2015
year
2015
publication date
2015/7/7
authors
AP Jacob, MK Akarvardar, SJ Bentley, BJ Pawlak
link
https://patents.google.com/patent/US9076842B2/en
resource_link
https://patentimages.storage.googleapis.com/22/61/96/09bea95401b951/US9076842.pdf
inventors
Ajey Poovannummoottil Jacob, Murat Kerem Akarvardar, Steven John Bentley, Bartlomiej Jan Pawlak
patent_office
US
patent_number
9076842
application_number
14011125