Publications
Methods of forming low defect replacement fins for a finfet semiconductor device and the resulting devices
Abstract
One illustrative device disclosed herein includes a substrate fin formed in a Substrate comprised of a first semiconductor material, wherein at least a sidewall of the substrate fin is positioned substantially in a< 100> crystallographic direction of the crystalline structure of the substrate, a replacement fin structure positioned above the substrate fin, wherein the replacement fin structure is comprised of a semiconductor material that is different from the first semiconductor mate rial, and agate structure positioned around at least a portion of the replacement fin structure.
- Date
- September 18, 2014
- Authors
- J Fronheiser, AP Jacob, WP Maszara, K Akarvardar
- Inventors
- Jody Fronheiser, Ajey P Jacob, Witold P Maszara, Kerem Akarvardar
- Patent_office
- US
- Application_number
- 13839998