Publications
Low temperature electrical performance of ultrathin oxide MOS capacitors with p+ poly-Si1-xGex and poly-Si gate materials
Abstract
Low temperature electrical performance of ultrathin oxide MOS capacitors with p+ poly-Si1-xGex and poly-Si gate materials Toggle navigation My submissions Login Toggle navigation View item imec Publications Repository imec Publications Conference contributions View item imec Publications Repository imec Publications Conference contributions View item Low temperature electrical performance of ultrathin oxide MOS capacitors with p+ poly-Si1-xGex and poly-Si gate materials Thumbnail Metadata Show full item record Authors Jacob, AP; Myrberg, T.; Yousif, MYA; Nur, O.; Willander, M.; Lundgren, P.; Sveinbjörnson, EÖ; Caymax, Matty Conference XI International Workshop on Physics of Semiconductor Devices - IWPSD Title Low temperature electrical performance of ultrathin oxide MOS capacitors with p+ poly-Si1-xGex and poly-Si gate materials Publication type Proceedings paper Collections Conference …
Metadata
- publication
- year
- 2002
- publication date
- 2002
- authors
- AP Jacob, T Myrberg, MYA Yousif, O Nur, M Willander, P Lundgren, EÖ Sveinbjörnson, Matty Caymax
- link
- https://imec-publications.be/handle/20.500.12860/6425